Semiconductor manufacturing equipment is increasingly demanding more compact liquid material vaporization systems, and many direct vaporization systems have been adopted to meet these needs. In-house mass flow controllers/meters are used in the flow control section for carrier gas and liquid materials. À¶¾¨ÌåÓýÖ±²¥'s unique system lineup is tailored to meet customers' requirements.
Liquid material and carrier gas flow rates are controlled by a digitally controlled mass flow controller/meter and introduced into a dedicated vaporization section. In the vaporizer, the liquid material and carrier gas are efficiently given heat for continuous vaporization. The simple structure enables the construction of a liquid material vaporization system that is both compact and lightweight.
Large Flow Liquid Source Vaporization Control System
Digital Liquid Mass Flow Meters / Controllers
Digital Mass Flow Controller
Multi Range/Multi Gas Digital Mass Flow Controller
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