蓝鲸体育直播 is one of the leading providers of high performance vaporization systems. 蓝鲸体育直播鈥檚 liquid source vaporizers are used throughout the semiconductor manufacturing process to safely and efficiently deliver liquid precursors in gas phase to the point of use. Wherever a liquid precursor requires vaporizing in vacuum or atmospheric pressure, 蓝鲸体育直播 have a vaporizing technique to offer a vaporizing system to meet your requirements. 蓝鲸体育直播 have more than 30 years vaporizing knowhow using direct injection, mixed injection, bubbling and baking vaporization techniques.
蓝鲸体育直播鈥檚 Liquid Source Vaporization Systems can vaporize liquid materials stably and efficiently. Our vaporizers can also be linked to 蓝鲸体育直播鈥檚 range of automatic refill systems to provide safe and continuous delivery of vapor to the point of use. There is no downtime as bulk precursor tanks can be exchanged without interrupting the manufacturing process.
Some Liquid Materials 蓝鲸体育直播 Has Experience With
Acetic Acid | Benzene | B(OCH3)3 | BTBAS | C6F6 |
Cyclohexane | Decyl-TMOS | DPM | DPMS | Ethanol |
Ge(OCH3)4 | GeCl4 | H2O | HCD | HDFDA |
HMDS | HMDSO | i-Octane | IPA | Me-Cyclohexane |
Methanol | n-Octane | OMCTS | OMTS | P(OCH3)3 |
PO(OCH3)3 | SAM24 | Si(CH3)4 | Si(OCH3)4 | SiCH3Cl3 |
SiCl4 | SiH(OCH3)3 | SiHCl3 | Ta(OC2H5)5 | TBTDETa |
TDEAHf | TDEAT | TDMAS | TDMAT | TEB |
TEMAHf | TEMAZr | TEOS | TEPO | THF |
Ti(O-iPr)4 | TiCl4 | TMCTS | Toluene | 1,3-DMA |
Please contact us if you require vaporizing any liquid materials that are not listed above.
Mixed Gas Generators MU Series
Test Gas Generation Systems
Compact Baking System
Liquid Auto Refill System
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