蓝鲸体育直播

IR-200

Gas Monitor for Chamber Cleaning End Point Monitoring

毂旊矂 Cleaning End Point 氇媹韯半鞚 鞙勴暅 IR-200 臧鞀 氇媹韯办瀰雼堧嫟. IR-200鞚 SiF4 臧鞀 雴嶋弰毳 鞁れ嫓臧勳溂搿 氇媹韯半頃橁碃 SiF4 臧鞀 雴嶋弰毳 旮办鞙茧 靹胳矙 膦呺 歆鞝愳潉 鞁濍硠頃╇媹雼.

Segment: Semiconductor
Manufacturing Company: 蓝鲸体育直播, Ltd.
  • Monitor SiF4 concentration up to 5000 ppm
  • Compact design
  • Can be instralled into exhaust lines
  • In addition to SiF4, this gas monitor can be used to measure CIF3 and other gases.
Model name IR-200
Measurement Gas SiF4 gas
Measurement Range 0 to 5000ppm(0 to 500Pa)
Repeatability

卤1%贵.厂.

Cell length 30mm, 1.2 in
Response Time 30 seconds or less (T90)
Pressure Resistance 0.3MPa(A)
Gas Cell Heating Temperature 150 鈩 (Max)
Contact Material 厂鲍厂-316尝銆丅补贵2銆丗碍惭
Leak Rate 1脳10-10笔补銉籱3/s
Fitting NW25 Flange
Analog Output 4 to 20 mA DC
Contact Output 3 channels (ERR銆丠igh銆丩ow)
Contact Input 1 channel for zero calibration
Power 24 V DC, 30 W (Max)
Dimension (W x H X D)

Sensor锛 150脳268脳90mm / 3.5x5.9x10.6 in

Controller锛 48脳96脳130mm / 1.9x3.8x5.1 in

Mass

Sensor锛4.5kg / 9.9 lb

Controller锛0.5kg / 1.1 lb

鞝滍拡 氍胳潣

蓝鲸体育直播鞝滍拡鞚 鞛愳劯頃 鞝曤炒毳 鞗愴晿鞁滊┐, 鞎勲灅鞚 鞏戩嫕鞐 雮挫毄鞚 鞛呺牓鞚 攵韮侂摐毽诫媹雼.

* 電 頃勳垬鞛呺牓頃鞛呺媹雼.

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